The 9700A Compressor is based on Helix Technology’s 9600 Compressor platform for
highest reliability in cryopump compressor technology. With increased helium output,
the 9700A Compressor is ideal for operating multiple cryopumps.
Dimensions 34.34” h x 19.42” w x 21.18” d (871mm h x 493mm w x 537.9mm d)
Weight 350 lbs (159 kg)
Operating Voltage
50 Hz Input 180-253 Vac (3 phase)
60 Hz Input 190-253 Vac (3 phase)
Input power 5.8kW
Cooling water 2 GPM to 4 GPM