Features

■Piezoresistive pressure sensor;

■260-1260 mbar absolute pressure range

■Low power consumption

■Low noise (0.02 mbar RMS)

■25 cm resolution

■Embedded offset and span temperature

compensation

■SPI and I

2C interfaces

■Supply voltage 1.8 V to 3.6 V

■High overpressure capability: 20x Full scale

■High shock survivability (10000 g)

■Small and thin package

■ECOPACK® Lead-free compliant

Applications

■Altimeter and barometer for portable devices

■GPS applications

■Weather station equipment

The sensing element consists of a suspended

membrane realized inside a single mono-silicon

substrate. It is capable to detecting pressure and

is manufactured using a dedicated process

developed by ST, called VENSENS.

The VENSENS process allows to build a mono-

silicon membrane above an air cavity with

controlled gap and defined pressure.

The membrane is very small compared to the

traditionally built silicon micromachined

membranes. Membrane breakage is prevented by

intrinsic mechanical stoppers.

The IC interface is manufactured using a standard

CMOS process that allows a high level of

integration to design a dedicated circuit which is

HCLGA-16 3x3x1 mm HCLGA-16 3x3x1 mm