Fast Regen Control PN# E31001190, S/N J06537638
Description:CTI Cryogenics On-Board 10 Cryopump
CE Marked:Yes
Specifications:
Pumping Speeds:
Water Vapor:9,000 liters/sec.
Air:3,000 liters/sec.
Hydrogen:5,000 liters/sec.
Argon:2,500 liters/sec.
Capacity:
Argon:2,000 std. liters
Hydrogen (5 x 10-6Torr):24 std. liters