基片类型和规格
Substrate Types /基片类型 | “A” Surface (CLA) | “B” Surface (CLA) |
Asfired Alumina (Al2O3) 99.6% 共烧氧化铝 | < 3µ" (76nm) | < 4µ" (100nm) |
Polished Alumina Al2O3) 99.6% 抛光氧化铝 | < 1.0µ" (25nm) | < 1.0µ" (25nm) |
Aluminum Nitride (AlN) /氮化铝 | < 4.0µ" (100nm) | < 4.0µ" (100nm) |
Beryllium Oxide (BeO) /氧化铍 | < 4.0µ" (100nm) | < 4.0µ" (100nm) |
Fused Silica, Quartz (SiO2) /二氧化硅、石英 | 60/40 optical polish | 60/40 optical polish |
Sapphire (a/c plane-Al2O3) /蓝宝石 | < 1.0µ" (25nm) | < 1.0µ" (25nm) |
Ferrites and Garnets /铁氧体和石榴子石 | < 16.0µ" (406nm) | < 16.0µ" (406nm) |
Polished Titanates /抛光钛酸盐 | < 4µ" (100nm) | < 4µ" (100nm) |
材料厚度和公差可以根据客户要求定制.
材料规格(化学成份、纯净度、颜色、密度、表面抛光、拱曲度、厚度、厚度误差、工艺加工尺寸、温度系数、电介质、硬度等)
-—具体请见公司网站:www.thinfilm.com
Asfired Alumina \\ 氧化铝(AL2O3) 99.6% 0.005" (0.127mm) ± 0.0005" (0.0127mm) 0.010" (0.254mm) ± 0.001" ( 0.0254mm) 0.015" (0.381mm) ± 0.001" ( 0.0254mm) 0.020" (0.508mm) ± 0.001" ( 0.0254mm) 0.025" (0.635mm) ± 0.001" ( 0.0254mm) 0.030" (0.762mm) ± 0.002" ( 0.0508mm) 0.040" (1.016mm) ± 0.002" ( 0.0508mm) 0.050" (1.270mm) ± 0.003" ( 0.0762mm) 0.300" (7.620mm) ± 0.005" ( 0.127mm) Polished Alumina \\ 氧化铝 (AL2O3) 99.6% 0.003" (0.076mm) ± 0.0005" (0.0127mm) 0.004" (0.101mm) ± 0.0005" (0.0127mm) 0.005" (0.127mm) ± 0.0005" (0.0127mm) 0.006" (0.152mm) ± 0.0005" (0.0127mm) 0.007" (0.178mm) ± 0.0005" (0.0127mm) 0.010" (0.254mm) ± 0.0005" (0.0127mm) 0.015" (0.381mm) ± 0.0005" (0.0127mm) 0.020" (0.508mm) ± 0.0005" (0.0127mm) 0.025" (0.635mm) ± 0.0005" (0.0127mm) 0.030" (0.762mm) ± 0.0005" (0.0127mm) 0.031" (0.787mm) ± 0.0005" (0.0127mm) 0.035" (0.889mm) ± 0.0005" (0.0127mm) 0.040" (1.016mm) ± 0.0005" (0.0127mm) 0.045" (1.143mm) ± 0.0005" (0.0127mm) 0.050" (1.270mm) ± 0.0005" (0.0127mm) Sapphire \\ 蓝宝石 (a/c plane-AL2O3) 0.005" (0.127mm) ± 0.0005" (0.0127mm) 0.010" (0.254mm) ± 0.0005" (0.0127mm) 0.015" (0.381mm) ± 0.0005" (0.0127mm) 0.020" (0.508mm) ± 0.0005" (0.0127mm) 0.025" (0.635mm) ± 0.0005" (0.0127mm) Beryllium Oxide \\ 氧化铍 (BeO) 0.005" (0.127mm) ± 0.0005" (0.0127mm) 0.010" (0.254mm) ± 0.0005" (0.0127mm) 0.015" (0.381mm) ± 0.0005" (0.0127mm) 0.020" (0.508mm) ± 0.0005" (0.0127mm) 0.025" (0.635mm) ± 0.0005" (0.0127mm) 0.030" (0.762mm) ± 0.0005" (0.0127mm) 0.085" (2.159mm) ± 0.0005" (0.0127mm) 0.125" (3.175mm) ± 0.0005" (0.0127mm) | Fused Silica, Quartz\\石英玻璃 (SiO2)\\二氧化硅 0.003" (0.076mm) ± 0.0005" (0.0127mm) 0.004" (0.101mm) ± 0.0005" (0.0127mm) 0.005" (0.127mm) ± 0.0005" (0.0127mm) 0.007" (0.178mm) ± 0.0005" (0.0127mm) 0.010" (0.254mm) ± 0.0005" (0.0127mm) 0.015" (0.381mm) ± 0.0005" (0.0127mm) 0.020" (0.508mm) ± 0.0005" (0.0127mm) 0.025" (0.635mm) ± 0.0005" (0.0127mm) Ferrites and Garnets \\ 铁氧体和石榴石 0.010" (0.254mm) ± 0.001" ( 0.0254mm) 0.015" (0.381mm) ± 0.001" ( 0.0254mm) 0.020" (0.508mm) ± 0.001" ( 0.0254mm) 0.025" (0.635mm) ± 0.001" ( 0.0254mm) Polished Titanates Dielectrics from 20–110 \\抛光钛酸酯酸 0.010" (0.254mm) ± 0.0005" (0.0127mm) 0.015" (0.0381mm) ± 0.0005" (0.0127mm) 0.020" (0.508mm) ± 0.0005" (0.0127mm) 0.025" (0.635mm) ± 0.0005" (0.0127mm) Aluminum Nitride (AlN) \\氮化铝 0.005" (0.127mm) ± 0.0005" (0.0127mm) 0.010" (0.254mm) ± 0.0005" (0.0127mm) 0.0118" (0.300mm) ± 0.0005" (0.0127mm) 0.015" (0.381mm) ± 0.0005" (0.0127mm) 0.020" (0.508mm) ± 0.0005" (0.0127mm) 0.025" (0.635mm) ± 0.0005" (0.0127mm) 0.030" (0.762mm) ± 0.0005" (0.0127mm) 0.031" (0.787mm) ± 0.0005" (0.0127mm) 0.035" (0.889mm) ± 0.0005" (0.0127mm) 0.040" (1.016mm) ± 0.0005" (0.0127mm) 0.0468" (1.1887mm) ± 0.0005" (0.0127mm) 0.047" (1.1938mm) ± 0.0005" (0.0127mm) 0.0472" (1.1988mm) ± 0.0005" (0.0127mm) 0.0492" (1.25mm) ± 0.0005" (0.0127mm) 0.053" (1.3462mm) ± 0.0005" (0.0127mm) 0.0571" (1.458mm) ± 0.0005" (0.0127mm) 0.058" (1.4732mm) ± 0.0005" (0.0127mm) 0.0581" (1.4757mm) ± 0.0005" (0.0127mm) 0.060" (1.524mm) ± 0.0005" (0.0127mm) 0.065" (1.651mm) ± 0.0005" (0.0127mm) 0.069" (1.7526mm) ± 0.0005" (0.0127mm) 0.080" (2.032mm) ± 0.0005" (0.0127mm) 0.084" (2.1336mm) ± 0.0005" (0.0127mm) 0.085" (2.159mm) ± 0.0005" (0.0127mm) 0.090" (2.286mm) ± 0.0005" (0.0127mm) |