20条100段温度曲线，最高温度1200°C，真空能力可达10-3毫巴，可选10-6毫巴。100mm（4寸晶圆），快速斜坡上升（高达150 K /秒）和斜坡下降速率（高达200 K / min的）
Max. wafer size：100 mm (4“)
Chamber material：Quartz glass chamber
Chamber height：11 mm
Loading system：Quartz glass tray
Vacuum capability：Up to 10-3 (10-6) mbar
Process chamber size：110x110x11 mm (WxDxH)
Temperature：max. Up to 1200 °C
Temp. unifomity：+/- 1% from desired temp.
Heating：18 IR lamps, 18 kW
Heating zones：Top and bottom heating (programmable)
Ramp up rate：Better than 150 K/sec
Ramp down rate：T=1200>400°C: 200K/min T=400>100°C: 30K/min
Interface：USB to PC
Controller：Fast PID controller
Software：Win based ,UniSoft“
Cooling：Water cooled
Inlet pressure water：2 to 6 bar
Dimension oven：555 mm x 460 mm x 520mm
(WxHxD)：(21.8“x18.1“x20.5“)
Weight：45 kg
Programs：20 programs storable (unlimited on PC)
Electrical connection：CEE 3x32 A, 230 V, 3 ~
