VPO-1000-300 Technical Data
Chamber：
·Chamber area：350 mm x 350 mm
·Heated area：320 mm x 320 mm
·Chamber height：50 mm
·Chamber walls：Aluminium polished, easy to clean
(optionally：stainless steel)
Loading：
·Cover：opens and closes vertically
·Direct or remote control for automatical application (SPS, robotics).
Heating：
·Bottom heating：2 x 12 lamps crossed (18 kW total power)
·Top heating：2 x 12 lamps crossed (18 kW total power)
Cooling：·Nitrogen gas
Process control：
·Control：PID Controller, Model Eurotherm 2604 (20 programs with 100 steps each) 5 slm N2
·Optionally：up to max. 4 gas lines or max. 2 MFCs
Vacuum (Pumps optional)：
·MP (Membrane pump)：10 mbar. Manometer monitoring.
·RVP (Rotary vane pump)： 10-3 mbar. Vacuum sensor up to 10-3
mbar by UniSoft
·HVP (Turbomolecular pump)：10-6 mbar. Vacuum sensor up to 10-7 mbar by UniSoft or pump.
        The vacuum in the process chamber is very quickly achieved due to gas sealed separation from the lamp fields.
CDA：·6 to 10 bar
Connections：·Vacuum connector：KF 16
(all on rear side) ·Exhaust：KF16
·Gas line(s)：4mm OD Swagelok compression fitting
·Cooling water supply：10 mm hose (1x inlet, 1x outlet)
·Feed through 2 x DN16
Power & Voltage：
·36 kW (2 x 18 kW)
·2 x [CEE 3 x 32 A / 230 V AC, 3 P +N +PE]
Dimensions：·504 mm x 504 mm x 680 mm (WxDxH)
Weight：·about 100 kg