▣ 搬运机器人的特性

● 高强度,高精度,高信赖性

● Z Axis: 450mm

● ￠ Axis: -5°～335°

● RR Axis: 1032mm

● RL Axis: 1032mm

● 负载 : MAX.10/each(including Hand)

● 反复精度: 0.1mm

● 应用:Glass size:2-4Gen(730*920)

wafer/DUT size:8wafer-1Gen(270*360)

半导体,LCD等 .