轴向 Orientation

Z-cut ± 0.2°

直径  Diameter

76.2mm ± 0.3mm

基准面 Orientation Flat (OF)

22mm ± 2mm

Perpendicular to X ± 0.2°

第二基准 Second Refer. Flat (RF)

10mm ±3mm

Cw180° ± 0.5° from OF

Cw270° ± 0.5° from OF

厚度 Thickness

500um ± 5um

1000um ± 5um

晶片表面 Surface

双面抛光Double sides polished

S/D 20/10

TTV

≤ 6um

WARP

≤ 20um

浓度 Concentration

0.5--6%

折射率 Refraction Index

n0=2.2827 ± 0.0003 ne=2.1928± 0.0003

prism coupler method @632.8nm Doped 5mol%

边缘倒角 Edge Beveling

Edge rounding