| 用途 |
组分名称及浓度范围 |
平衡气 |
| 氦气杂质分析 |
CO 1-100ppm CO2 1-100ppm CH4 1-100ppm H2 1-100ppm
O2 3- 100ppm N2 3-100ppm Ar 1-100ppm |
He |
| 氩气杂质分析 |
CO 1-100ppm CO2 1-100ppm CH4 1-100ppm H2 1-100ppm
O2 3- 100ppm N2 3-100ppm |
Ar |
| 氮气杂质分板 |
CO 1-100ppm CO2 1-100ppm CH4 1-100ppm H2 1-100ppm
O2 3- 100ppm |
N2 |
