The Most Reliable Top Performing, High Sensitivity
Remote Particle Counter
Measuring particles using light scattering principles is as much an art as a
science. Met One 6000 series has perfected the art of measuring particles for its
high sensitivity 0.2 µ m channel. The 0.2 µ m sensor is developed to provide the
most reliable and dependable performance for its operating range.
Available in a sensitivity range of 0.2 to 10 µ m, and flow rates of 2.83 LPM or
28.3 LPM, the Met One 6000 series is designed to meet the specific needs of
cleanroom operations within the semiconductor, hard disk drive and flat panel
display industries.
With an array of communication and mechanical installation options, the
Met One 6000 is easy to integrate with any facility monitoring system. These
features also reduce downtime for instrument removal and reinstallation during
routine calibration and preventative maintenance cycles.
The MET ONE 6000 offers industry leading diagnostic features that reduce
troubleshooting time and related downtime costs. Built with Long Life Laser™
technology and supported by industry leading after sales support from
Hach Ultra, Met One 6000 offers unparallel user experience in product quality,reliability and performance for remote particle counting.

Port Sizes Model 6002 0.32 cm (1/8-inch) ID inlet 0.64 cm (¼-inch) ID outlet
Model 6003 0.32 cm (1/8-inch) ID inlet 0.64 cm (¼-inch) ID outlet
Model 6015 0.64 cm (¼-inch) ID inlet 0.64 cm (¼-inch) ID outlet
Flow Rate Model 6002 0.1 CFM (2.83 LPM)
Model 6003 0.1 CFM (2.83 LPM)
Model 6015 1.0 CFM (28.3 LPM)
Sensitivity Model 6002 0.2 μm at 0.1 CFM (2.83 LPM)
Model 6003 0.3 μm at 0.1 CFM (2.83 LPM)
Model 6015 0.5 μm at 1.0 CFM (28.3 LPM)
Range Model 6002 0.2 μm to 5.0 μm at 0.1 CFM (2.83 LPM)
Model 6003 0.3 μm to 10.0 μm at 0.1 CFM (2.83 LPM)
Model 6015 0.5 μm to 10.0 μm at 1.0 CFM (28.3 LPM)
Channel Sizes Standard 2-channel Optional 4-channel*
Model 6002 0.2 and 0.3 μm 0.2, 0.3, 0.5 and 1.0 μm
Model 6003 0.3 and 0.5 μm 0.3, 0.5, 1.0 and 5.0 μm
Model 6015 0.5 and 5.0 μm 0.5, 1.0, 5.0 and 10.0 μm
Counting Efficiency Model 6002 50% at 0.2 μm
Model 6003 50% at 0.3 μm
Model 6015 50% at 0.5 μm