Diameter: 2” 4”

Conductivity Type: P/Boron,  N/Phosphorus

Resistivity: ≤0.0015Ω.cm

Diameter: 50.8±0.2 100±0.3 (mm)

Thickness: 425±25, 625±25 (um)

Orientation: ±0.5°, ±0.5°

Primary length: 16±1, 32±2 (mm)

TTV/TIR: ≤10, ≤10 (um)

Bow: ≤10, ≤10 (um)

Warp: ≤15, ≤15 (um)

RRV: ≤8, ≤8 (%)

Packing: 25pcs in cassette, carton box outside