Wafer Square Side: 125x125±0.5mm, 156x156±0.5 mm
Diagonal Length: 150±0.5mm, 200±0.5mm
Growth Method: CZ
Conductivity Type: P-type/boron
Shape Wafer: Quasi-squared
Surface Orientation: ±3o
Dislocation: ≤3000/cm2
Resistivity: 0.5-3 Ω.cm, 3-6Ω.cm
Lifetime: 10 μs min
Carbon Content: ≤1×1017 atoms/cm3
Oxygen Content: ≤1×1018 atoms/cm3
Wafer Thickness: 180/200/240±20μm
Square Side Angle: 90±0.3o
TTV: ≤30 μm
Warp/Bow: ≤50 um, ≤30 um
Saw mark: ≤20 um
Edge Chips: Length≤1.0mm,Depth≤0.5mm, ≤1 ea/wafer
Wafer Surface: As-cut and cleaned
Contamination: No dirt/oil stain/ remains of soap/ glue
Scratch/Cracks/pinhole: No scratch, cracks and pinholes visible with naked eyes
Packing: Wafer is in cassette, carton box outside