|
| Flow
Range (N2 Equivalent) | 10,20,30,50,
100,200,300,500SCCM
1,2,3,5SLM | 10,20,30SLM | 40,50SLM |
| Valve
Type | N/O: Normally Open, N/C: Normally Closed |
| Controlled
Volume Range | 2%～100%F.S. |
| Flow
Accuracy | ±1% F.S. (Accuracy guaranteed between 15 ~ 35ºC) |
| Setting
Signal | 0.1 ~ 5VDC |
| Output
Signal | 0 ~ 5VDC |
| Repeatability | ±0.2%F.S. |
| Response
Time | ≤1sec |
| Required
Pressure Difference | 50
~ 300kPa | NO
50 ~ 300kPa (6SLM ~ 10SLM)
NO 100 ~ 300kPa (11SLM ~ 20SLM)
NC
150 ~ 300kPa (21SLM ~ 30SLM)
NC 50 ~ 300kPa ( 6SLM ~ 10SLM)
NC
100 ~ 300kPa (11SLM ~ 30SLM) | 200 ~ 300kPa |
| MAX
Operating Pressure | 400kPaG |
| Proof
Pressure | 1MPaG |
| Guaranteed
Operating Temperature Range | 5 ~ 50℃ |
| External
Leak Rate | Metal Seal： 1×10-11Paㆍm3/sec He、Elastomer Seal：
1×10-7Paㆍm3/sec He |
| Mounting
Orientation | Can be mounted in any orientation |
| Current
Consumption | T1000F +15VDC：50mA、-15VDC：200mA
T1000FD +11 ~ +24VDC、5.5VA
(5.5W) |
| Communication | Analog 0 ~ 5V DC, Digital: RS485 (Fujikin Protocol),
DeviceNetTM |
| Wetted
Surface Material | 316L SS, Magnetic Stainless Steel, PTFE |
| Seal
Material | Metal Seal: SUS316L, Elastomer Seal: Fluoro-Rubber
(Chloroprene Rubber) |
| Actuator
Type | Solenoid actuator |
| Surface
Finish | None (Option: EP) |
| Fittings | 1/4” UJR, 1/4” F900, 1/4” 1.5 Wseal®, 1/4” 1.125 Wseal®,
1/4” 1.125 Cseal |
| Digital
Communication | RS-485, Standard transmission rate 38400bps, Maximum
connected units 127 |
