【皮拉尼标准真空计PSG500/-S、PSG502-S、PSG510-S】价格_厂家

品牌

INFICON

型号

PSG500/-S、PSG502-S，PSG510

类型

真空规

测量范围

5*10¯4...1000毫巴Pa

适用范围

前级真空压强监测

加工定制

外形尺寸

70.3*32.8*20.9㎜

重量

0.14kg

灯丝

钨，镍

测量原理

皮拉尼热导原理

输出讯号，电压范围

0...+10.3V

响应时间

80毫秒

保护等级

IP 40

PSG5xx 大气压至中真空真空计

INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型标准真空计采用当今市场上最先进的数字皮拉尼技术。不锈钢传感器单元坚固耐用，结构设计紧凑，适用于半导体系统和标准应用，例如前级真空管。

益处

轻松一键调节 ATM 和 HV
节省空间的坚固设计
铝质壳体
可在任意方向安装
不锈钢测量单元，带金属密封馈入装置
便于集成的对数信号输出
螺纹接头，具有 10 巴绝对过压能力
250 °C 烘烤型
在腐蚀应用中可选购镍丝
陶瓷馈入装置，适用于腐蚀性极强的应用 (PSG510 & PSG512)
可选设定点
RoHS 合规

典型应用

高真空电离真空计控制
前级真空压力监控
真空系统中的安全电路
高真空和低真空范围内的一般真空测量和控制

类型

PSG500 tungsten	PSG500-S tungsten, setpoints	PSG502-S nickel, setpoints	PSG510-S tungsten, setpoints, ceramic feedthroughs	PSG512-S nickel, setpoints, ceramic feedthroughs
测量原则		thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani
精度 (N2)
1 x 10-3… 100 毫巴	% of reading	±15%	±15%	±15%	±15%	±15%
5 x 10-4… 1 x 10-3 毫巴	% of reading	±50%	±50%	±50%	±50%	±50%
100 … 1000 毫巴	% of reading	±50%	±50%	±50%	±50%	±50%
可重复性（空气）
1 x 10-3… 100 毫巴	% of reading	2%	2%	2%	2%	2%
输出信号（测量信号）
电压范围	V	0 … +10.3	0 … +10.3	0 … +10.3	0 … +10.3	0 … +10.3
测量范围	V	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0
测量范围（空气、O2、CO、N2）	mbar	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000
设定点
设定点数量		none	2	2	2	2
设置范围	mbar	‒	2 x 10-3 … 500	2 x 10-3 … 500	2 x 10-3 … 500	2 x 10-3 … 500
滞后	% of reading	‒	10% above lower threshold	10% above lower threshold	10% above lower threshold	10% above lower threshold
继电器触点	V (dc) A (dc)	‒	30	30	30	30
继电器触点：转换时间	ms	‒	<20	<20	<20	<20
电源电压
真空计上	V (dc)	+14 …+30	+14 …+30	+14 …+30	+14 …+30	+14 …+30
波纹	V (p-p)	≤1	≤1	≤1	≤1	≤1
电压与压强		logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade
内部容积
DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF	cm³ (in.³)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R 长管	cm³ (in.³)	10 (0.61)	10 (0.61)	10 (0.61)	10 (0.61)	10 (0.61)
1/8'' NPT，4 VCR，8 VCR，1/2'' 管	cm³ (in.³)	2 (0.122)	2 (0.122)	2 (0.122)	2 (0.122)	2 (0.122)
容许温度
运行	°C	+5 … +60	+5 … +60	+5 … +60	+5 … +60	+5 … +60
真空连接 (1)	°C	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)
贮存	°C	-20 … +65	-20 … +65	-20 … +65	-20 … +65	-20 … +65
重量
DN 16 ISO-KF，7/16-20 UNF	g	80	80	80	80	80
DN 16 CF-R，4 VCR	g	100	100	100	100	100
1/8'' NPT，1/2'' 管	g	70	70	70	70	70
8 VCR，DN 16 ISO-KF 长管	g	130	130	130	130	130
DN 16 CF-R 长管	g	140	140	140	140	140
错误信号	V	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)
输出电阻	Ω	2 x 4.7	2 x 4.7	2 x 4.7	2 x 4.7	2 x 4.7
最小负载电阻	kΩ	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof
反应时间	ms	80	80	80	80	80
真空计识别	kΩ	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common
调整		one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment
电流消耗	mA	<500 (max. starting current)	<500 (max. starting current)	<500 (max. starting current)	<500 (max. starting current)	<500 (max. starting current)
功耗	W	≤1	≤1	≤1	≤1	≤1
电气连接		FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male
传感器电缆		8 poles plus shielding	8 poles plus shielding	8 poles plus shielding	8 poles plus shielding	8 poles plus shielding
电缆长度	m	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)
暴露于真空的材料		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435	AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
单丝		W	W	Ni	W	Ni
容许压力	bar (absolute)	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases
安装定位		any	any	any	any	any
保护等级		IP40	IP40	IP40	IP40	IP40