美国进口全自动白光干涉仪，平整度检测，粗糙度检测

Veeco Wyko HD3300 Profiling System, a non-contact optical profiler, utilizes two technologies to measure a wide range of surface heights. Phase-shifting interferometry (PSI) allows measurement of smooth surfaces and small steps, while vertical scanning
interferometry (VSI) allows measurement of rough surfaces and steps up to several millimeters high.

Manufacture Specification 

– Capable of handling up to 8″/200mm wafers
– Non contact sub-micron Optical Profiler for 3D Surface Profilometry
– 8” Auto XY with 0.5 uM encoder / Auto TT
– Stitching Software – Vertical resolution as low as 0.1 nm or 1 Angstrom
– XY Tip/Tilt
– Motorized Z
– Auto Focus
– Keyboard controller with trackball & Joystick
– 0.1um resolution 8″ x 8″ XY table with 63.5mm x 63.5mm bondable area
– 0.08 to 13.1 um Lateral Spatial Sampling
– 10 Micron Step Height Standard and SIC Calibration Standard
– Four Positions Motorized Turret
– 1.5IX interferometric objective, 20% RFL, 9.63mm WD
– 20IX interferometric objective, 90% RFL, 4.7mm WD – 0.5X FOV lens
– 50IX Mirau Interferometer Objective with working distance 3.4mm
– FOV : 2.5X, .5X or .75X with Alignment.
– System Monitor with Analog output to 9″ B/W video monitor
– TMC Active Isolation Table