全新/二手/租赁 Helios LAB-rc电池片反射率测试仪电池片反射率测试仪

Helios LAB-rc, a good investment!
TheHeliosLAB-rcsystem can beoperated without anyspecial
skills. It is very easy to operate. With the integrated manual
single-axis table aline scan on asolar wafer can be perfomed
very fast. Thespecial designed sampletableallowsto measure
on everyposition on asix inch wafer.
Dark position and Reference sample at a fixed position are
integrated in the manual single-axis table. This allows quick
dark and reference measurement within a few seconds. After
that, the user may run a continuous measurement while
moving the sample, or just measure a few specific points on
the sample. The software allows to make a measurement
report and data storage for each measured wafer in a
comfortableway.
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MEASUREMENT​

Measurement Parameters Reflectance / Layer thickness
/ Color
Reflectance Range 0 ~ 100 %
Wavelength Range 380 ~ 1050 nm
Thickness Range (SiN) 25 ~ 120 nm
(SiO) 35 ~ 160 nm
Reflectance Accuracy ±0.1 %
Reflectance Repeatability* <0.05%
Thickness Accuracy ±1 nm
Thickness Repeatability* ±0.2 nm
Color Measurement Lab / xyY / XYZ / Lch
Color Accurracy x,y 3σ ±0.004 / Y 3σ ±0.5
Color Repeatability* x,y 3σ <0.002 / Y 3σ <0.2

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