我们单位生产半导体级别2寸单晶抛光硅片
Growth Method CZ
Conductivity Type P / N
Dopant P,B,AS
Resistivity 0.001 - 1000 ohm-cm
Crystal orientation <110> <111>
surface single/double polished
packing Aluminum foil packing
particle <10 @ 0.3um
TTV < 4um
TIR < 4um
BOW < 30um
WARP <30m