Specification
- Flange: 80mm ~ 100mm flange
- Speed range: 5,000rpm ~ 6,000rpm
- Torque: o.64Nm ~ 2.50Nm of rated torque
- Output: 300W ~ 700W
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Application: Spin Coater & Developer for Photo track
A. Machine Requirement
High Speed (5000rpm ~ 8000rpm)
Fast el/Decel time
Low Noise and Vibration
Maximized hollow bore size for Process
Unification.
Hollow Shaft for Vacuum
Cooling system (Water cooling system)
Very Low level of mechanical Tolerance
Customized design for each machine
Minimized size with multi stacked design
B. Why LS Mecapion
Application
1. Manufacturing Process of Semiconductor
2. Photo Track (Coater and Developer)
One of main equipment for the Photo process.And it control the main process
like COATING, EXPOSURE and DEVELOPING
3. Cleaning and Etching
A Kind of Cleaning equipment for ETCHING, CLEANING, STRIP and BEVEL ETCHING
4. SCRUBBER (Applied below 8” )
Equipment for Physical Flush Cleaning, superior particle removalwith brush, Sonic and Aerosol nozzles
