Specification

- Flange: 80mm ~ 100mm flange

- Speed range: 5,000rpm ~ 6,000rpm

- Torque: o.64Nm ~ 2.50Nm of rated torque

- Output: 300W ~ 700W

A. Machine Requirement

• l High Speed (5000rpm ~ 8000rpm)

• l

 Fast el/Decel time

• l

 Low Noise and Vibration

• l

 Maximized hollow bore size for Process

•   Unification.  

•  Hollow Shaft for Vacuum

• Cooling system (Water cooling system)

• Very Low level of mechanical Tolerance

• Customized design for each machine

• Minimized size with multi stacked design

 B. Why LS Mecapion

• l Various Experience for the design of Customized motor.

• l

 Sufficient well-trained Engineer.

• l

 Flexible Manufacturing and Machining system

• l

 Control and Drive Technology for Servo system

• l

 Encoder Technology for Hollow shaft servo motor

Application

1. Manufacturing Process of Semiconductor

2. Photo Track (Coater and Developer)

One of main equipment for the Photo process.And it control the main process

like COATING, EXPOSURE and DEVELOPING

3. Cleaning and Etching

A Kind of Cleaning equipment for ETCHING, CLEANING, STRIP and BEVEL ETCHING

4. SCRUBBER (Applied below 8” )

Equipment for Physical Flush Cleaning, superior particle removalwith brush, Sonic and Aerosol nozzles