供应密科理LED Gas Purification 美国Entegris工艺气体净化器
- Consistently delivers ultrapure gas
- Designed for use with HCl, Cl2, HBr, BCl3, SiCl4and SiF4. The purifiers remove moisture to <1 ppb (part-per-billion) in N2.
- Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
- Does not release hydrocarbons that may contaminate the process
- Uses ambient temperature purification technology – no power or heat required
- Low pressure drop across purifiers
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