哈尔滨特博万德有限公司是英国ICEMOSTECH公司在中国的独家代理,高品质的SOI wafer和SuperJunction MOSFET是ICEMOS的主营产品,凭借15年的制造经验ICEMOS在世界范围内有众多的客户群体,分别在欧洲,美国,日本、韩国和中东设有代理商。
SOI是指将一薄层硅置于一绝缘衬底上。晶体管将在称之为'SOI' 的薄层硅上制备。基于SOI结构上的器件将在本质上可以减小结电容和漏电流,提高开关速度,降低功耗,实现高速、低功耗运行。作为下一代硅基集成电路技术,SOI广泛应用于微电子的大多数领域,同时还在光电子、MEMS等其它领域得到应用。
SOI wafer尺寸: 4”(100mm), 5”(125mm), 6”(150mm) and 8"(200mm)
SOI Spec. 规格:
1- Bonded SOI wafer (绝缘硅上键合硅片)
For 4”(100mm), 5”(125mm), 6”(150mm)
----
Handle wafer minimum 300um maximum 1000um,
---- Buried Oxide, minimum 0.1 um, maximum 4 um,
---- Device layer minimum 2 um, max 500 um.
For
8"(200mm)
---- Handle
thickness minimum 500um and maximum 675um,
---- Buried
Oxide minimum 0.1 um, maximum 4 um,
---- Device
layer minimum 5 um, maximum 500 um.
2- Si-Si direct wafer bonding (replacement for epi) 硅-硅直接键合,可替代外延片
100mm, 125mm, 150mm and 200mm, thickness as
specified above.
3- Engineered SOI, Double
SOI (DSOI), Trench Isolation SOI (dielectric isolation),
Cavity SOI (for pressure sensor, gyro and
accelerometer sensor, microfludic etc.)
and finally Through Silicon Via
(TSV)
---- Cavity SOI - Bonded SOI or Silicon silicon DWB wafers
with cavities performed within the wafer
---- Multiple SOI 2 or 3 or more layers of SOI designed around your
process
---- Structured wafers silicon wafers or SOI with buried electrode
layers, vias, interconnect already incorporated
4- SOI + Trench & Refill
Features
- Significant die shrink compared to conventional dielectric isolation
(DI) or junction isolation
- Bulk quality top silicon layer
- Total device-to-device isolation
- Lower substrate capacitance than bulk
- Fully flexible specification on SOI, Trench and refill parameters
5- Superjunction MOSFET
为了一些客户的紧急需求,英国工厂存有部分现货,欢迎您来电咨询更详细的产品信息!