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Technical Information
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Kalrez 2037 for Semiconductor Applications
Compound Description
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Kalrez 2037 is a white compound that is suitable for use in some plasma and gas deposition
applications. It exhibits very low weight loss in oxygen and fluorine-based plasmas and has good
mechanical strength properties. A maximum service temperature of 220°C is suggested. Ultrapure
post-cleaning and packaging is optional.
Performance Features/Benefits Typical Physical Properties1
• Very low weight loss in oxygen and 2
Hardness , Shore A 79
fluorine-based plasmas 3
100% Modulus , MPa 6.20
• Good mechanical strength properties Tensile Strength at Break3, MPa 16.88
3
• Good compression set properties Elongation at Break , % 200
4
• Good resistance to dry process chemistry Compression Set , % 27
70 hr at 204°C, %
Maximum Continuous Service 220
5
Temperature , °C
1 Not to be used for specification purposes
2 ASTM D2240 (pellet test specimens)
3 ASTM D412 (dumbbell test specimen)
4 ASTM 395B (pellet test specimens)
5 DuPont Performance Elastomers proprietary test method
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Kalrez 2037 Compatibility Ratings In Various Plasma Environments
Plasma Chemical Compatibility
Environment Formula Rating
Argon Ar Excellent
Boron Trichloride BCl3 Good
Boron Trifluoride BF3 Excellent
Chlorine Cl2 Excellent
Hexafluoroethane (F-116) C2F6 Good
Hydrogen Bromide HBr Excellent
Nitrogen Trifluoride NF3 Good
Oxygen O2 Fair
Silicon Tetrafluoride SiF4 Good
Sulfur Hexafluoride SF6 Good
Tetrafluoromethane (F-14) CF4 Good
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For further information please contact one of the offices below, or visit our website at
The information set forth herein is furnished free of charge and is based on technical data that DuPont Performance Elastomers believes to be
reliable. It is intended for use by persons having technical skill, at their own discretion and risk. Handling precaution information is given with the
understanding that those using it will satisfy themselves that their particular conditions of use present no health or safety hazards. Since
conditions of product use and disposal are outside our control, we make no warranties, express or implied, and assume no liability in connection
with any use of this information. As with any material, evaluation of any compound under end-use conditions prior to specification is essential.
Nothing herein is to be taken as a license to operate or a recommendation to infringe on patents.
Caution: Do not use in medical applications involving permanent implantation in the human body. For other medical applications, discuss with
your DuPont Performance Elastomers customer service representative and read Medical Caution Statement H-69237.
™
DuPont is a trademark of DuPont and its affiliates.
Kalrez® is a registered trademark of DuPont Performance Elastomers.
Copyright © 2004, 2005 DuPont Performance Elastomers. All Rights Reserved.
(06/05) Printed in U.S.A.
Reorder no: KZE-A10062-00-B0605
