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Technical Information
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Rev. 4, June 2005
®
Kalrez Sahara™ 8575
Compound Description
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Kalrez Sahara 8575 is a white compound for etching, ashing, PVD, metal CVD and ALD
processes. It offers low weight loss in oxygen and fluorine-based plasmas, low outgassing, and
excellent elastic recovery properties. Kalrez® Sahara™ 8575 has excellent vacuum and long-term
sealing performance, good mechanical properties and is well-suited for both static and dynamic
sealing applications (e.g., gas inlets, chamber lid seals, slit valve doors, etc.). A maximum
continuous service temperature of 300°C is suggested. Ultrapure post-cleaning and packaging is
standard for all parts made of Kalrez® Sahara™ 8575.
Key Performance Features 1
Contribute to Extended Seal Life Typical Physical Properties
Color White
• Excellent resistance to oxygen and 2
fluorine-based plasmas, as well as Hardness, Shore A (pellet) 62
chlorinated cleaning gasses (e.g., CIF3) Hardness, Shore M (O-ring)3 72
• Low weight loss 100% Modulus4, MPa 2.47
• Very low outgassing 4
Tensile Strength at Break , MPa 12.04
• Excellent (low) compression set properties 4
Elongation at Break , % 230
• Improved elastic recovery properties 5
Compression Set , % 29
Suggested Applications 70 hr at 204°C
® ™ Max.Continuous Service 300
Kalrez Sahara 8575 is an excellent choice
6
for: Temperature , °C
1
Not to be used for specification purposes
• Chamber lids 2
ASTM D2240 (pellet test specimens)
• Gas inlets 3
ASTM D2240 and ASTM D1414 (AS568 K214 O-ring test specimens)
• Quartz windows 4ASTM D412 Test Method (dumbbell test specimens)
• Throttle valves 5 ASTM D395B (pellet test specimens)
6 DuPont Performance Elastomers proprietary test method
• Other plasma applications
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Fabs Choose Kalrez Sahara 8575 for Improved Performance
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Kalrez Sahara 8575 has been reported to significantly improve wafer production in semiconductor
etching and ashing applications. In evaluations by a fabline customer, Kalrez® Sahara™ 8575
exhibited longer seal life compared to a competitive perfluoroelastomer in both dynamic and static
sealing applications.
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Kalrez Sahara 8575 Case Report
Customer Large East Coast Fab Line
Equipment TEL Unity
Process Type Deep Trench Etch
Components End Point Window Seal (229 O-ring) (most difficult location for seal
performance)
Process Gasses HBr, O , SF , NF
2 6 3
Rf Power 1500 Watts
Process Temperature ~70°C
Incumbent Material Competitive FFKM A2
Incumbent Performance After 6 months, fluoroelastomer was half eroded, competitive FFKM
became brittle, developed cracks and leaked.
Kalrez® Sahara™ 8575 Evaluated in application for over 10 months without failure. Based
upon this success, customer evaluated complete seal set (15 sizes)
and has changed all competitive FFKM to Kalrez® 8575.
Plasma Performance
Because there is no industry standard to characterize elastomer plasma resistance, OEMs and Fab
lines rely on in-use testing and actual performance. To further assist the industry in proper seal
selection, DuPont Performance Elastomers has developed a test method that approximates chamber
conditions to quantify seal resistance to plasma. In this test, O-rings are placed on a silicon wafer in
a process change and directly exposed to extremely damaging plasma environments. Kalrez®
Sahara™ 8575 exhibited low weight loss upon exposure to reactive plasmas versus the competitive
perfluoroelastomers tested.
Weight Loss, %1 hr at 900 W, 0.1 Torr, Direct Exposure
Parallel Plate Reactor, RIE Mode
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Compression Set Performance
Compression set is routinely used in the elastomers industry to compare relative sealing
performance, particularly at elevated temperatures. However, in many cases, short-term data (70 hr)
is used which is not representative of long-term performance. Kalrez® Sahara™ 8575 exhibits
excellent long-term compression set performance.
Long-Term Compression Set Performance* at 204°C
* ASTM D 395B and D 1414 (214 O-rings)
O-Ring Elastic Recovery Performance
While compression set results are an important measure of long-term sealing performance, this
test method does not adequately reflect the elastic recovery of a seal that is cooled down under
compression. Good elastic recovery properties enable a seal to recover quickly and be ready for
service faster between process or maintenance cycles. Many compounds have good compression
set values but poor elastic recovery after cool down under compression. The data below reflects
O-ring recovery after samples were compressed 25% for 16 hours at elevated temperatures, then
cooled down under compression. Percent recovery was measured 30 minutes following removal of
compression plates. Kalrez® Sahara™ 8575 exhibits excellent elastic recovery properties.
Elastic Recovery Performance (214 O-rings)
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The information set forth herein is furnished free of charge and is based on technical data that DuPont Performance Elastomers believes to be
reliable. It is intended for use by persons having technical skill, at their own discretion and risk. Handling precaution information is given with the
understanding that those using it will satisfy themselves that their particular conditions of use present no health or safety hazards. Since
conditions of product use and disposal are outside of our control, we make no warranties, express or implied, and assume no liability in
connection with any use of this information. As with any material, evaluation of any compound under end-use conditions prior to specification is
essential. Nothing herein is to be taken as a license to operate or a recommendation to infringe on any patents. CAUTION: Do not use in medical applications involving permanent implantation in the human body. For other medical applications, discuss
with your DuPont Performance Elastomers customer service representative and read Medical Caution Statement H-69237.
DuPont is a trademark of DuPont and its affiliates.
® ®
Kalrez and Kalrez Sahara™ are trademarks or registered trademarks of DuPont Performance Elastomers.
Copyright © 2005 DuPont Performance Elastomers. All Rights Reserved.
(06/05) Printed in U.S.A.
Reorder no: KZE-H88213-00-E0605
