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Technical Information
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Rev. 3, June 2005
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Kalrez Sahara 8085
Compound Description
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Kalrez Sahara 8085 has been specifically developed for plasma and gas deposition applications,
i.e., etching, ashing, HDPCVD, PECVD, SACVD, etc. It has been formulated for minimal particle
generation in NF ® ™
3 plasma. Kalrez Sahara 8085 exhibits very low particle generation and low
weight loss in oxygen and fluorine-based plasmas, has excellent mechanical properties and is well-
suited for both static and dynamic sealing applications (e.g., bonded slit valve doors, bonded gate
valves, bonded pendulum valves, gas orifice seals, gas feedthrough seals, chamber lid seals, etc.)
A maximum continuous service temperature of 240°C is suggested. Kalrez® Sahara™ 8085 can also
withstand short-term excursions up to 275°C. Ultrapure post-cleaning and packaging is standard for
parts made from Kalrez® Sahara™ 8085.
Performance Features/Benefits Typical Physical Properties1
• Very low particle generation in NF plasma Color Beige
3
2
• Longer seal life Hardness, Shore A (pellet) 80
3
• Reduced PM time and increased Hardness, Shore M (O-ring) 86
equipment uptime 4
100% Modulus , MPa 7.5
4
• Lower cost of ownership Tensile Strength at Break , MPa 16.3
4
Elongation at Break , % 159
Suggested Applications Compression Set5, %
• Bonded slit valve door seals 70 hr at 150°C 28
70 hr at 175°C 35
• Bonded gate valves 70 hr at 204°C 42
• Chamber lid seals Max. Continuous Service 240
6
Temperature , °C
• Gas inlet seals 6
Max. Excursion Temperature , °C 275
• Gas orifice seals
1
Not to be used for specification purposes
• Gas feedthrough seals 2 ASTM D2240 (pellet test specimens)
3 ASTM D2240 and ASTM D1414 (AS568 K214 O-ring test specimens)
4 ASTM D412 (dumbbell test specimens)
5 ASTM D395B and ASTM D1414 (AS568 K214 O-ring test specimens)
6 DuPont Performance Elastomers proprietary test methods
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Fabs Choose Kalrez Sahara™ 8085 For Improved Performance
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Kalrez Sahara 8085 has been reported to significantly improve wafer production in a variety of
semiconductor HDPCVD and PECVD applications where NF3 plasma is used during the cleaning
cycle. In a number of evaluations at fabline customers, Kalrez® Sahara™ 8085 exhibited improved
mechanical strength, lower particle generation and longer seal life compared to competitive
perfluoroelastomers in both static and dynamic sealing applications.
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Case Report 1—Kalrez Sahara 8085 Reported to Reduce Particle Adders by 53%
Over Competitive Perfluoroelastomer (FFKM A11)
• HDPCVD O-ring
• Process chemistry: Silane
• Cleaning chemistry: NF , O and O
3 2 3
• Competitive FFKM generated
significantly more particle adders
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Case Report 2— Kalrez Sahara 8085 Improved Wafer Production over 25% versus
Competitive Perfluoroelastomer (FFKM A2)
• PECVD gas box, shower head and plate seal
• Process chemistry: TEOS, O at 400°C
2
• Cleaning chemistry: NF plasma at 3500 watts
3
• Competitive perfluoroelastomer failed due to cracking and excessive leakage
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Case Report 3— Kalrez Sahara 8085 Extended Seal Life 100% versus Competitive
Perfluoroelastomer (FFKM A2)
• HDPCVD turbo gate O-ring
• Process chemistry: SiH , O at 150°C
4 2
• Cleaning chemistry: NF plasma
3
• Competitive perfluoroelastomer replaced due to high particle generation
The information set forth herein is furnished free of charge and is based on technical data that DuPont Performance Elastomers believes to be
reliable. It is intended for use by persons having technical skill, at their own discretion and risk. Handling precaution information is given with the
understanding that those using it will satisfy themselves that their particular conditions of use present no health or safety hazards. Since
conditions of product use and disposal are outside of our control, we make no warranties, express or implied, and assume no liability in
connection with any use of this information. As with any material, evaluation of any compound under end-use conditions prior to specification is
essential. Nothing herein is to be taken as a license to operate or a recommendation to infringe on any patents. CAUTION: Do not use in medical applications involving permanent implantation in the human body. For other medical applications, discuss
with your DuPont Performance Elastomers customer service representative and read Medical Caution Statement H-69237.
DuPont is a trademark of DuPont and its affiliates.
® ®
Kalrez and Kalrez Sahara™ are trademarks or registered trademarks of DuPont Performance Elastomers.
Copyright © 2005 DuPont Performance Elastomers. All Rights Reserved.
(06/05) Printed in U.S.A.
Reorder no: KZE-A10055-00-D0605
