Diameter           

2 inch,

3 inch

4 inch

5 inch - 7 inch

Thickness       

500±15 µm, 1000±20 µm

Orientation   

X-Axis  Y-Axis  Z-Axis
±0.1° Y-axis 36° Rotated, Y-axis 42° Rotated,              

TTV 

≤10 µm

≤15 µm

≤20 µm

≤30 µm

BOW

≤10 µm

≤15 µm

≤20 µm

≤30 µm

Front polishing(S/D)

10/5

Back Surface

Fine ground, (#240/#180) / Polished,
10/5

Chamfer

< 0.3 mm, 45°±5°