Diameter           

2
inch,

3 inch

4 inch

5 inch - 7
inch

Thickness       

500±15 µm, 660±15 µm, 710±15 µm, 790±15
µm, 1000±20 µm

Orientation   

X-Axis  Y-Axis  Z-Axis
±0.1° Y-axis 128° Rotated, Y-axis 64° Rotated,              
Y-axis 41°
Rotated

The first reference to the
Orientation

±
0.2°

The first reference to the
length

16.0±0.8
mm

22.0 ±1.0
mm

32.5±1.5
mm

comply with the the provisions of
standard production

TTV 

≤10 µm

≤15 µm

≤20 µm

≤30
µm

BOW

≤10 µm

≤15 µm

≤20 µm

≤30
µm

Front
polishing

10/5

Back Surface

Fine ground, (#240/#180) / Polished,
10/5

Chamfer

< 0.3 mm,
45°±5°